Etching and Deposition Systems

HISTERESIS is CORIAL partner in Romania for etching tools and deposition tools. CORIAL, the plasma processing equipment manufacturer and plasma process developer proposes plasma-based technologies including:

Plasma etch

Forming nano-scale structures from a vast array of materials with RIE, ICP, and DRIE plasma etching technologies.

Plasma enhanced deposition

Creating a vast array of thin films with PECVD and ICP CVD technologies.

Atomic Layer Processing

Both ALE and ALD technologies rely on surface reactions that limit deposition or etching.

CORIAL provides the most versatile, compact and reliable etch and deposition systems of the industry.